Characterization of the Optical Properties and Composition of TiNxThin Films by Spectroscopic Ellipsometry and X-ray Photoelectron Spectroscopy
1996 ◽
Vol 24
(9)
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pp. 627-633
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2000 ◽
Vol 147
(7)
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pp. 2636
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Keyword(s):
2014 ◽
Vol 34
(3)
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pp. 841-849
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2003 ◽
Vol 18
(5)
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pp. 1123-1130
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1986 ◽
Vol 4
(3)
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pp. 1580-1584
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2011 ◽
Vol 415-417
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pp. 642-647